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1

[IEEE 2018 IEEE Micro Electro Mechanical Systems (MEMS) - Belfast (2018.1.21-2018.1.25)] 2018 IEEE Micro Electro Mechanical Systems (MEMS) - Sense of touch in submicron region realized by two-axis tactile sensor with a needle-like contactor

Nakashima, Tsubasa, Watatani, Kazuki, Terao, Kyohei, Shimokawa, Fusao, Takao, Hidekuni

Year:

2018

Language:

english

File:

PDF, 1.19 MB

english, 2018

2

Pure Photosynthates Extraction Sensor Device With Highly Precise Phloem/Xylem Position Identification

Ono, Akihito, Yoneda, Akihito, Ishizuka, Hiroki, Terao, Kyohei, Takao, Hidekuni, Takahashi, Naoshi, Kobayashi, Tsuyoshi, Kataoka, Ikuo, Shimokawa, Fusao

Journal:

IEEE Sensors Journal

Year:

2018

Language:

english

File:

PDF, 3.51 MB

english, 2018

3

Fabrication of a microelectromechanical system mirror array and its drive electrodes for low electrical interference in wavelength-selective switches

Tomomi Sakata, Mitsuo Usui, Shingo Uchiyama, Nobuhiro Shimoyama, Junichi Kodate, Hiromu Ishii, Tohru Matsuura, Fusao Shimokawa, Yasuhiro Sato

Journal:

IEEJ Transactions on Electrical and Electronic Engineering

Year:

2011

Language:

english

File:

PDF, 578 KB

english, 2011

4

Vertical comb-drive MEMS mirror with sensing function for phase-shift device

Kentaro Oda, Hidekuni Takao, Kyohei Terao, Takaaki Suzuki, Fusao Shimokawa, Ichirou Ishimaru, Fumikazu Oohira

Journal:

Sensors and Actuators A: Physical

Year:

2012

Language:

english

File:

PDF, 2.47 MB

english, 2012

5

[IEEE 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Estoril, Portugal (2015.1.18-2015.1.22)] 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - A tactile sensor with the reference plane for detection abilities of frictional force and human body hardness aimed to medical applications

Maeda, Yusaku, Terao, Kyohei, Suzuki, Takaaki, Shimokawa, Fusao, Takao, Hidekuni

Year:

2015

Language:

english

File:

PDF, 1.98 MB

english, 2015

6

Phloem-sap-dynamics sensor device for monitoring photosynthates transportation in plant shoots

Yano, Yuya, Ono, Akihito, Terao, Kyohei, Suzuki, Takaaki, Takao, Hidekuni, Kobayashi, Tsuyoshi, Kataoka, Ikuo, Shimokawa, Fusao

Journal:

Japanese Journal of Applied Physics

Year:

2018

Language:

english

File:

PDF, 2.35 MB

english, 2018

7

Fabrication of Magnetically Driven Microvalve Arrays Using a Photosensitive Composite

Nakahara, Tasuku, Suzuki, Junya, Hosokawa, Yuki, Shimokawa, Fusao, Kotera, Hidetoshi, Suzuki, Takaaki

Journal:

Magnetochemistry

Year:

2018

Language:

english

File:

PDF, 3.42 MB

english, 2018

8

A low-energy fast-atom source

Fusao Shimokawa, Kazutoshi Nagai

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Year:

1988

Language:

english

File:

PDF, 379 KB

english, 1988

9

[IEEE 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Paris, France (2012.01.29-2012.02.2)] 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Self-aligned fabrication process for active membrane made of photosensitive nanocomposite

Nakahara, Tasuku, Hosokawa, Yuuki, Terao, Kyohei, Takao, Hidekuni, Shimokawa, Fusao, Oohira, Fumikazu, Namazu, Takahiro, Kotera, Hidetoshi, Suzuki, Takaaki

Year:

2012

Language:

english

File:

PDF, 944 KB

english, 2012

10

[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - New H-shape soft tortion spring and its micro mirror application

Uchiyama, Shingo, Sato, Makoto, Usui, Mitsuo, Sakata, Tomomi, Shimokawa, Fusao

Year:

2010

Language:

english

File:

PDF, 450 KB

english, 2010

11

Reflection-type 2×2 optical waveguide switch using the Goos–Hänchen shift effect

Sakata, Tomomi, Togo, Hiroyoshi, Shimokawa, Fusao

Journal:

Applied Physics Letters

Year:

2000

Language:

english

File:

PDF, 360 KB

english, 2000

12

[IEEE 2012 IEEE 6th International Conference on Nano/Molecular Medicine and Engnieering (NANOMED) - Bangkok, Thailand (2012.11.4-2012.11.7)] 2012 IEEE 6th International Conference on Nano/Molecular Medicine and Engineering (NANOMED) - Development of a universal integrated micro cell culture system

Inoue, Masatoshi, Terao, Kyohei, Takao, Hidekuni, Shimokawa, Fusao, Oohira, Fumikazu, Suzuki, Takaaki, Okonogi, Atsuhito, Kotera, Hidetoshi

Year:

2012

Language:

english

File:

PDF, 1.01 MB

english, 2012

13

Signal enhancement of protein binding by electrodeposited gold nanostructures for applications in Kretschmann-type SPR sensors

Nagase, Noriko, Terao, Kyohei, Miyanishi, Nobumitsu, Tamai, Kazunori, Uchiyama, Noboru, Suzuki, Takaaki, Takao, Hidekuni, Shimokawa, Fusao, Oohira, Fumikazu

Journal:

The Analyst (Royal Society of Chemistry)

Year:

2012

Language:

english

File:

PDF, 1.08 MB

english, 2012

14

Continuous-wave operation and mirror loss of a U-shaped GaAs/AlGaAs laser diode with two totally reflecting mirrors

Shimokawa, Fusao, Tanaka, Hidenao, Sawada, Renshi, Hara, Shigeji

Journal:

Applied Physics Letters

Year:

1990

Language:

english

File:

PDF, 604 KB

english, 1990

15

[IEEE 2013 International Conference on Optical MEMS and Nanophotonics (OMN) - Kanazawa, Japan (2013.08.18-2013.08.22)] 2013 International Conference on Optical MEMS and Nanophotonics (OMN) - Integration of angular rate sensor on large deflection polymer-MEMS mirror

Yamashita, Hirofumi, Terao, Kyohei, Takao, Hidekuni, Shimokawa, Fusao, Oohira, Fumikazu, Suzuki, Takaaki

Year:

2013

Language:

english

File:

PDF, 383 KB

english, 2013

16

[IEEE 2012 IEEE Sensors - Taipei, Taiwan (2012.10.28-2012.10.31)] 2012 IEEE Sensors - A novel integrated tactile image sensor for detection of surface friction and hardness using the reference plane structure

Maeda, Yusaku, Terao, Kyohei, Suzuki, Takaaki, Shimokawa, Fusao, Takao, Hidekuni

Year:

2012

Language:

english

File:

PDF, 1.42 MB

english, 2012

17

[IEEE 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - San Francisco, CA, USA (2014.01.26-2014.01.30)] 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - “assist-free”assembly technique of standing optical devices on soft spring actuator stages

Oka, Yusaku, Shinozaki, Ryosuke, Terao, Kyohei, Suzuki, Takaaki, Shimokawa, Fusao, Oohira, Fumikazu, Takao, Hidekuni

Year:

2014

Language:

english

File:

PDF, 2.62 MB

english, 2014

18

High-power fast-atom beam source and its application to dry etching

Shimokawa, Fusao

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

1992

Language:

english

File:

PDF, 723 KB

english, 1992

19

Reactive–fast-atom beam etching of GaAs using Cl2 gas

Shimokawa, Fusao, Tanaka, Hidenao, Uenishi, Yuji, Sawada, Renshi

Journal:

Journal of Applied Physics

Year:

1989

Language:

english

File:

PDF, 902 KB

english, 1989

20

[IEEE 2013 International Conference on Optical MEMS and Nanophotonics (OMN) - Kanazawa, Japan (2013.08.18-2013.08.22)] 2013 International Conference on Optical MEMS and Nanophotonics (OMN) - Dual-axis polymer-MEMS mirror made of Photosensitive Nanocomposite

Suzuki, Junya, Miura, Takuya, Terao, Kyohei, Takao, Hidekuni, Shimokawa, Fusao, Namazu, Takahiro, Oohira, Fumikazu, Suzuki, Takaaki

Year:

2013

Language:

english

File:

PDF, 290 KB

english, 2013

21

[IEEE 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics - Clearwater, FL, USA (2009.08.17-2009.08.20)] 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics - Electrically separated two-axis MEMS mirror array module for wavelength selective switches

Usui, Mitsuo, Uchiyama, Shingo, Hashimoto, Etsu, Hadama, Koichi, Ishii, Yuzo, Matsuura, Nobuaki, Sakata, Tomomi, Shimoyama, Nobuhiro, Sato, Yasuhiro, Ishii, Hiromu, Matsuura, Tohru, Shimokawa, Fusao,

Year:

2009

File:

PDF, 1.55 MB

2009

22

[IEEE LEOS 2009 -22nd Annuall Meeting of the IEEE Lasers and Electro-Optics Society (LEO) - Belek-Antalya, Turkey (2009.10.4-2009.10.8)] 2009 IEEE LEOS Annual Meeting Conference Proceedings - High-aspect-ratio gold electrodes fabricated by thick-multilevel interconnection technology for electrical isolation of MEMS mirrors in wavelength-selective switches

Sakata, Tomomi, Usui, Mitsuo, Uchiyama, Shingo, Shimoyama, Nobuhiro, Kodate, Junichi, Ishii, Hiromu, Matsuura, Tohru, Shimokawa, Fusao, Sato, Yasuhiro

Year:

2009

Language:

english

File:

PDF, 948 KB

english, 2009

23

A Post-Complementary Metal Oxide Semiconductor Formation Process of High-Adhesiveness SU-8 Structures for Reliable Fabrication of Integrated Microelectromechanical System Sensors

Maeda, Yusaku, Terao, Kyohei, Suzuki, Takaaki, Shimokawa, Fusao, Takao, Hidekuni

Journal:

Japanese Journal of Applied Physics

Year:

2013

Language:

english

File:

PDF, 6.44 MB

english, 2013

24

[IEEE 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Estoril, Portugal (2015.1.18-2015.1.22)] 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - A novel configuration of tactile sensor to acquire the correlation between surface roughness and frictional force

Kozai, Ryogo, Terao, Kyohei, Suzuki, Takaaki, Shimokawa, Fusao, Takao, Hidekuni

Year:

2015

Language:

english

File:

PDF, 1.65 MB

english, 2015

25

[IEEE 2014 International Conference on Optical MEMS and Nanophotonics (OMN) - Glasgow, UK (2014.8.17-2014.8.21)] 2014 International Conference on Optical MEMS and Nanophotonics - Dual-axis hybrid-MEMS mirror having Si and polymer hinges for large-area 2D raster scan

Yamashita, Hirofumi, Terao, Kyohei, Takao, Hidekuni, Shimokawa, Fusao, Oohira, Fumikazu, Suzuki, Takaaki

Year:

2014

Language:

english

File:

PDF, 199 KB

english, 2014

26

Fabrication of fluorinated polyimide microgrids using magnetically controlled reactive ion etching (MC-RIE) and their applications to an ion drag integrated micropump

Furuya, Akinori, Shimokawa, Fusao, Matsuura, Tohru, Sawada, Renshi

Journal:

Journal of Micromechanics and Microengineering

Year:

1996

Language:

english

File:

PDF, 1016 KB

english, 1996

27

A New High-Performance Ion Source Based on Magnetically Neutral Loop Discharge

Shimokawa, Fusao

Journal:

Japanese Journal of Applied Physics

Year:

2010

Language:

english

File:

PDF, 551 KB

english, 2010

28

Dependence of Purcell effect on fluorescence wavelength in dye molecules on metal–dielectric multilayer hyperbolic metamaterials

Tsurumachi, Noriaki, Izawa, Hayato, Tomioka, Ryo, Sakata, Tomohiro, Suzuki, Makoto, Tanaka, Yasuhiro, Shimokawa, Fusao, Nakanishi, Shunsuke

Journal:

Japanese Journal of Applied Physics

Year:

2016

Language:

english

File:

PDF, 626 KB

english, 2016

29

Fast protein detection in raw blood by size-exclusion SPR sensing

Terao, Kyohei, Hiramatsu, Shin-ichi, Suzuki, Takaaki, Takao, Hidekuni, Shimokawa, Fusao, Oohira, Fumikazu

Journal:

Analytical Methods

Year:

2015

Language:

english

File:

PDF, 788 KB

english, 2015

30

[IEEE TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference - Anchorage, AK, USA (2015.6.21-2015.6.25)] 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Generation of low-temperature atmospheric pressure plasma-jet patternable array at a 320µm pitch channel array

Ihara, Takuya, Yamasaki, Hidetaka, Terao, Kyohei, Suzuki, Takaaki, Shimokawa, Fusao, Takao, Hidekuni

Year:

2015

Language:

english

File:

PDF, 1.43 MB

english, 2015

31

[IEEE 2015 IEEE SENSORS - Busan, South Korea (2015.11.1-2015.11.4)] 2015 IEEE SENSORS - Reduction of contact force dependence on the MEMS hardness sensor using reference plane to detect human body hardness

Maeda, Yusaku, Terao, Kyohei, Shimokawa, Fusao, Takao, Hidekuni

Year:

2015

Language:

english

File:

PDF, 1.12 MB

english, 2015

32

SPIE Proceedings [SPIE SPIE's 1996 International Symposium on Optical Science, Engineering, and Instrumentation - Denver, CO (Sunday 4 August 1996)] Laser Interferometry VIII: Techniques and Analysis - Optical device positioning by using Becke lines

Shoji, Tetsufumi, Shimokawa, Fusao, Nishida, Yasuhide, Kujawinska, Malgorzata, Pryputniewicz, Ryszard J., Takeda, Mitsuo

Year:

1996

Language:

english

File:

PDF, 1.02 MB

english, 1996

33

SPIE Proceedings [SPIE ITCom 2001: International Symposium on the Convergence of IT and Communications - Denver, CO (Monday 20 August 2001)] Optoelectronic and Wireless Data Management, Processing, Storage, and Retrieval - Optical switch based on thermocapillarity

Sakata, Tomomi, Makihara, Mitsuhiro, Togo, Hiroyoshi, Shimokawa, Fusao, Kaneko, Kazumasa, Raymond, Robert, Srimani, Pradip K., Su, Renjeng, Wilmsen, Carl W.

Year:

2001

Language:

english

File:

PDF, 466 KB

english, 2001

34

Characterisation of optically driven microstructures for manipulating single DNA molecules under a fluorescence microscope

Takao, Hidekuni, Suzuki, Takaaki, Oana, Hidehiro, Washizu, Masao, Gel, Murat, Inukai, Ryo, Oohira, Fumikazu, Terao, Kyohei, Shimokawa, Fusao, Masuda, Chihiro

Journal:

IET Nanobiotechnology

Year:

2016

Language:

english

File:

PDF, 414 KB

english, 2016

35

Evaluation of Electrodeposited Gold Nanostructures for Applications in QCM Sensing

TERAO, Kyohei, KAKITA, Chihiro, NAGASE, Noriko, MIYANISHI, Nobumitsu, SUZUKI, Takaaki, TAKAO, Hidekuni, SHIMOKAWA, Fusao, OOHIRA, Fumikazu

Journal:

Analytical Sciences

Year:

2012

Language:

english

File:

PDF, 591 KB

english, 2012

36

Development of a local light stimulation device integrated with micro electrode array

UENO, Hidetaka, KOMAI, Shoji, TERAO, Kyohei, TAKAO, Hidekuni, SHIMOKAWA, Fusao, KOTERA, Hidetoshi, SUZUKI, Takaaki

Journal:

Mechanical Engineering Journal

Year:

2016

Language:

english

File:

PDF, 2.41 MB

english, 2016

37

[IEEE 2016 IEEE SENSORS - Orlando, FL, USA (2016.10.30-2016.11.3)] 2016 IEEE SENSORS - A two-axis tactile sensor with 1μm diameter tip of contactor for detection ability of micro region surface texture

Watatani, Kazuki, Kozai, Ryogo, Terao, Kyohei, Shimokawa, Fusao, Takao, Hidekuni

Year:

2016

Language:

english

File:

PDF, 1.41 MB

english, 2016

38

[IEEE 2016 IEEE SENSORS - Orlando, FL, USA (2016.10.30-2016.11.3)] 2016 IEEE SENSORS - Development of 2V sensitivity static electricity sensor with vertically mounted large electrode

Iima, Atsuya, Oka, Yusaku, Terao, Kyohei, Shimokawa, Fusao, Takao, Hidekuni

Year:

2016

Language:

english

File:

PDF, 1.30 MB

english, 2016

39

[IEEE 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Kaohsiung, Taiwan (2017.6.18-2017.6.22)] 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Highly pure phloem-sap-extraction sensor device for direct component analysis of nutrition in plant shoots

Ono, Akihito, Izumi, Ryosuke, Ishizuka, Hiroki, Terao, Kyohei, Takao, Hidekuni, Ichihashi, Ryuji, Kobayashi, Tsuyoshi, Kataoka, Ikuo, Shimokawa, Fusao

Year:

2017

Language:

english

File:

PDF, 2.30 MB

english, 2017

40

[IEEE 2017 IEEE SENSORS - Glasgow (2017.10.29-2017.11.1)] 2017 IEEE SENSORS - Biological information (pH/EC) sensor device for quantitatively monitoring plant health conditions

Izumi, Ryosuke, Ono, Akihito, Ishizuka, Hiroki, Terao, Kyohei, Takao, Hidekuni, Kobayashi, Tsuyoshi, Kataoka, Ikuo, Shimokawa, Fusao

Year:

2017

Language:

english

File:

PDF, 1.69 MB

english, 2017

41

[IEEE 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Kaohsiung, Taiwan (2017.6.18-2017.6.22)] 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - 1MPa resistant MEMS slide valve driven by an external actuator for high power fluidic applications

Takao, Hidekuni, Takemasa, Satoshi, Terao, Kyohei, Shimokawa, Fusao

Year:

2017

Language:

english

File:

PDF, 1.03 MB

english, 2017

42

Development of magnetically driven micro valve using SU-8/Fe composite

SUZUKI, Junya, TERAO, Kyohei, TAKAO, Hidekuni, SHIMOKAWA, Fusao, OOHIRA, Fumikazu, SUZUKI, Takaaki

Journal:

Journal of the Japan Society of Applied Electromagnetics and Mechanics

Year:

2015

Language:

english

File:

PDF, 1.51 MB

english, 2015

43

[IEEE 2016 IEEE SENSORS - Orlando, FL, USA (2016.10.30-2016.11.3)] 2016 IEEE SENSORS - Microscale phloem sap extraction sensor device for measuring biological information in plant branches

Ono, Akihito, Yoneda, Akihito, Tao, Yuichi, Terao, Kyohei, Takao, Hidekuni, Ichihashi, Ryuji, Kobayashi, Tsuyoshi, Kataoka, Ikuo, Shimokawa, Fusao

Year:

2016

Language:

english

File:

PDF, 767 KB

english, 2016

44

A MEMS hardness sensor with reduced contact force dependence based on the reference plane concept aimed for medical applications

Maeda, Yusaku, Terao, Kyohei, Shimokawa, Fusao, Takao, Hidekuni

Journal:

Japanese Journal of Applied Physics

Year:

2016

Language:

english

File:

PDF, 1.55 MB

english, 2016

45

Development of micro-inclined well array for trapping single cells

Tsukamoto, Takuya, Furuya, Naoki, Shimagami, Takuya, Sato, Rui, Shimokawa, Fusao, Akimitsu, Kazuya, Suzuki, Takaaki

Journal:

Electronics and Communications in Japan

Year:

2018

Language:

english

File:

PDF, 1.02 MB

english, 2018

46

[IEEE 2018 43rd International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz2018) - Nagoya, Japan (2018.9.9-2018.9.14)] 2018 43rd International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz) - THz Microcavity Made of Wire Grid Structure Containing Electrical Split Ring Resonator Metamaterials

Dieu Thanh, Nguyen Thi, Okabe, Kyosuke, Inoue, Shota, Shimokawa, Fusao, Nakanishi, Shunsuke, Tsurumachi, Noriaki

Year:

2018

Language:

english

File:

PDF, 396 KB

english, 2018

47

Evaluation of Multi-Electrode Effects on Electrovibration Tactile Stimulation

Ishizuka, Hiroki, Suzuki, Katsuyori, Terao, Kyohei, Takao, Hidekuni, Shimokawa, Fusao, Kajimoto, Hiroyuki

Journal:

Transactions of The Japan Institute of Electronics Packaging

Year:

2017

Language:

english

File:

PDF, 564 KB

english, 2017

48

Microscale Xylem Sap Flow Sensor Facilitating the Simultaneous Measurement of Flow Velocity and Direction

Hara, Yuki, Hara, Naoki, Ishizuka, Hiroki, Terao, Kyohei, Takao, Hidekuni, Shimokawa, Fusao

Journal:

Proceedings (American Bar Association. Section of International and Comparative Law)

Year:

2019

Language:

english

File:

PDF, 1.81 MB

english, 2019

49

Microscale Xylem Sap Flow Sensor Facilitating the Simultaneous Measurement of Flow Velocity and Direction

Hara, Yuki, Hara, Naoki, Ishizuka, Hiroki, Terao, Kyohei, Takao, Hidekuni, Shimokawa, Fusao

Journal:

Proceedings (American Bar Association. Section of International and Comparative Law)

Year:

2019

File:

PDF, 1.81 MB

2019

50

A highly sensitive MEMS silicon‐hair device reproducing the function of hair follicle

Hamamoto, Koki, Terao, Kyohei, Shimokawa, Fusao, Takao, Hidekuni

Journal:

Electronics and Communications in Japan

Year:

2019

Language:

english

File:

PDF, 4.49 MB

english, 2019

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